Technology and applications of Low Temperature Cofired Ceramic (LTCC) based sensors and microsystems
نویسنده
چکیده
The paper presents general information on LTCC materials, manufacturing processes and properties of fired modules. A Multichip Module package has been the main application of Low Temperature Cofired Ceramic (LTCC) technology. Recently, this technology is also used for production of sensors, actuators and microsystems. The research and development on the LTCC sensors and microsystems carried out in the Laboratory of Thick Film Microsystems at Wroclaw University of Technology are presented. LTCC microfluidic system is described in detail. Moreover, a short information is given on other LTCC applications .
منابع مشابه
Exploitation of Ltcc Qualities in Gas Sensors Application
In this contribution we deal with technology potential of the low temperature co-fired ceramic (LTCC) in association with design, development and production of organometallic thick film gas sensors. Customer demands to the gas sensors array and to the joint construction of the sensing part with evaluating ASIC led to the exploitation of LTCC potential in the production technology. The presented...
متن کاملPreparation and Analysis of MBS based Glass-Ceramic for LTCC Applications
In this paper the MBS (Magnesium borosilicate) based glass-ceramic have been prepared and characterised to find its suitability in Low temperature cofired ceramics (LTCC) technology. The glass-ceramics were prepared by using conventional solid state route. The experimental study was conducted on the MBS glass-ceramic containing MAS (Magnesium Alumino-Silicate) based glass-ceramic as an additive...
متن کاملInvestigation of low-temperature cofired ceramics packages for high-temperature SAW sensors
Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600 C. The devices showed promisin...
متن کاملLTCC Short Range Radar Sensor for Automotive Applications at 24 GHz
This paper presents the concept, design and measurement results of an FMCW radar module with an integrated planar antenna array, realised in LTCC (Low Temperature Cofired Ceramics) technology, for automotive applications operating at 24 GHz. A car manufacturer has specified the requirements for antenna and microwave module. The resulting design concept is discussed and subsequently, simulation ...
متن کاملInvestigation of Cofiring Process Conditions on Properties of Fired Low Temperature Cofired Ceramic Substrates Using Design of Experiment (doe)
Low Temperature Cofired Ceramics were developed around three decades ago. The technology is used in the fabrication of many various electronic components and devices. The aim of this paper is to present the possibility of applying Design of Experiment (DoE) methodology in the investigations of how cofiring process conditions influence several properties of fired substrates. The achieved results...
متن کامل